Facilities

Electron Beam Drawing Equipment Scanning Electron Microscope(SEM)(Cleanroom)

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Sputter Equipment(Cleanroom)

2

Dry Etching Equipment(Cleanroom)

3

Chemical Vapor Deposition(Cleanroom)

4

Fabrication Setup for DNA microarray

5

Probe Microscope

6

Laser Manipulation System (Room 03-104)

7

Femtosecond Laser System,45fs (Room 03-104)

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Femtosecond Laser System,Hurricane (Room 03-104)

9

時間分解光電子顕微鏡

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超高精度電子ビーム露光装置

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Last updated : 2014/03/13