- Electron Beam Drawing Equipment Scanning Electron Microscope(Cleanroom)
- Sputter Equipment (Cleanroom)
- Dry Etching Equipment (Cleanroom)
- Chemical Vapor Deposition (Cleanroom)
- Fabrication Setup for DNA microarray
- Probe Microscope
- Laser Manipulation System (Room 03-104)
- Femtosecond Laser System,45fs (Room 03-104)
- Femtosecond Laser System,Hurricane (Room 03-104)
- 時間分解光電子顕微鏡
- 超高精度電子ビーム露光装置
Electron Beam Drawing Equipment Scanning Electron Microscope(SEM)(Cleanroom)
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Sputter Equipment(Cleanroom)
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Dry Etching Equipment(Cleanroom)
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Chemical Vapor Deposition(Cleanroom)
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Fabrication Setup for DNA microarray
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Probe Microscope
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Laser Manipulation System (Room 03-104)
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Femtosecond Laser System,45fs (Room 03-104)
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Femtosecond Laser System,Hurricane (Room 03-104)
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時間分解光電子顕微鏡
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超高精度電子ビーム露光装置
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